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The smartVision family of products offers advanced inspection systems for detecting patterns defects and particles on a wafer. The product of family includes the V1000 and V1020 Microscope Loader, V2000 Bright Light Inspection and V3000 Macro-Scope Defect Review System.
The smartPro family of products includes systems used in photolithography process of semiconductor, MEMS, and other exotic substrate manufacturing. The product family includes the P7000 Alloy/Anneal System, P8000-10 Advanced Linear Track System, P8000-30 Frame Processing Track and the P9000 Cluster System.
The smartSort family of products offers high throughput sorting of wafers 50mm to 300m and to categories based on customer’s requirement.