Photoresist Coat
- Spin on Glass (SOG), Dopants
- Polyimide, BCB
- Positive and negative resist
- PMGI
- PMMA
Photoresist and Spin-On Dielectric Planarization
- Planarization of Thick Photoresist and Spin-On Dielectric
- Polyimide, BCB
- Closed Bowl Spinning, for reduced chemical consumption
Compound Wafer Alloy
Low-Temperature Annealing and Sintering
- Ohmic Alloy
- Resistor stabilization
- Hillock formation reduction
Dry Thin Film Develop
- Copper Bump/Pillar
- Resist thicknesses exceeding 100um
Metal Lift-Off
- Thin and thick metal lift off
- Photoresist strip
Piezo Electric Wafer Processing
- Controlled ESD processing
Bio Science
- Medical sensors
- Cancer detection
- Peptide Synthesizing
High Volume Manufacturing
- Dual Centralized Robot capability
- Wafer Flip