Photoresist Coat

  • Spin on Glass (SOG),¬†Dopants
  • Polyimide, BCB
  • Positive and negative resist
  • PMGI
  • PMMA

Photoresist Develop

  • Positive or Negative Develop
  • Solvent spray, stream or aspirated

 

Photoresist and Spin-On Dielectric Planarization

  • Planarization of Thick Photoresist and Spin-On Dielectric
  • Polyimide, BCB
  • Closed Bowl Spinning, for reduced chemical consumption

Spray Coating

  • Ultrasonic spray

 

Compound Wafer Alloy 

Low-Temperature Annealing and Sintering

  • Ohmic Alloy
  • Resistor stabilization
  • Hillock formation reduction

 

Dry Thin Film Develop

  • Copper Bump/Pillar
  • Resist thicknesses exceeding 100um

Metal Lift-Off

  • Thin and thick metal lift off
  • Photoresist strip

 

 

Processing Wafers on Tape Frame and Hoops

  • Dice Protection Coat
  • Post Dice Clean & Strip

 

 

Piezo Electric Wafer Processing

  • Controlled ESD processing

Bio Science

  • Medical sensors
  • Cancer detection
  • Peptide Synthesizing

High Volume Manufacturing

  • Dual Centralized Robot capability
  • Wafer Flip