Applications

Photoresist Coat

• Spin on Glass (SOG), Dopants
• Polyimide, BCB
• Positive and negative resist
• PMGI
• PMMA

Photoresist Develop

• Positive or Negative Develop
• Solvent spray, stream or aspirated

Photoresist and Spin-On Dielectric Planarization

• Planarization of Thick Photoresist and Spin-On Dielectric
• Polyimide, BCB
• Closed Bowl Spinning, for reduced chemical consumption

Spray Coating

• Ultrasonic spray

Compound Wafer Alloy 

Low-Temperature Annealing and Sintering

• Ohmic Alloy
• Resistor stabilization
• Hillock formation reduction

Dry Thin Film Develop

• Copper Bump/Pillar
• Resist thicknesses exceeding 100um

Metal Lift-Off

• Thin and thick metal lift off
• Photoresist strip

Processing Wafers on Tape Frame and Hoops

• Dice Protection Coat
• Post Dice Clean & Strip

Piezo Electric Wafer Processing

• Controlled ESD processing

Bio Science

• Medical sensors
• Cancer detection
• Peptide Synthesizing

High Volume Manufacturing

• Dual Centralized Robot capability
• Wafer Flip