Wafer Processing 50mm-300mm

Photoresist Coat & Develop

Planarization (SynchroSpin)

Spray Coating

Thermal Process

Laminate PR Develop

Metal Lift-Off

High Volume Manufacturing

Wafer on Frame & Hoop Process

Dice Protect Layer Coat

Post Dice Clean/Strip

Wafer Sorters

S5010 Floor-standing Sorter (up to 200 mm)

S5030 Floor-standing Sorter (up to 300 mm)

Wafer Inspection Systems

V1020 – Microscope Loader

V2000 – Brightlight Inspections

V3000 – Macro-Scope Defect Review System