Options

• Bowl clean
• Exhaust controller
• Optical EBR
• Flood expose
• Fire suppression
• Temperature control
• Additional backside rinses
• Spare bowl – quick change
• Syringe dispense
• Pump dispense
• Multiple wafer sizes without hardware change
• Square substrates
• Environmental control unit (ECU)
• Optical centering
• Resist bottle caps
• Closed lid co-rotating SynchroSpin

Coater

• Open hot plate (Standard)
• Closed lid with nitrogen purge
• Vacuum bake

• Temperature control
• Multiple developers
• Solvent/Aspirated develop
• Spray – Stream – Low Impact
• Optical EBR
• Optical centering
• Flood expose

 

• Nitrogen blow off
• Porous chuck
• Frame edge clean
• Custom cassettes
• Hot plate ovens
• Heated DI water
• Chemical mixing systems
• Aspirated heated DI water for cleaning
• DI water doping for ESD control
• Fire suppression
• Diverting valve (solvent and water separation)

Wafer cleaner, wafer scrubber:

• High pressure clean
• Heated fluids
• DI water doping for ESD control
• Wafer scrub brushes – multiple options
• Multiple chemical dispenses

 

Lift Off:

• Heated solvent
• Fire suppression
• Diverting valve (solvent and water separation)

 

 

Wafer Inspection System V2000:

• OCR (top and bottom)
• Multiple lights (Spot, dark field, multiple spectrum neon, monochromatic green, other custom lights)
• Backside inspection
• Digital image capture
• Notch/flat find
• Multiple wafer sizes without hardware change
• SECS/GEM

 

Wafer Inspection System V3000:

• OCR (top and bottom)
• Multiple lights (Spot, dark field, multiple spectrum neon, monochromatic green, other custom lights)
• Backside inspection
• Digital image capture
• Notch/flat find
• Multiple wafer sizes without hardware change
• SECS/GEM

 

Wafer Microscope Loader:

• OCR (top and bottom)
• Multiple wafer sizes without hardware change
• Macro inspection light
• SECS/GEM

 

Wafer Sorter:

• OCR (top and bottom)
• Multiple wafer sizes without hardware change
• Macro inspection light
• SECS/GEM
• Light curtain
• Multiple cassettes
• Optical centering
• Ionizer
• Uninterruptible Power Supply (UPS)
• Barcode reader