Photoresist Coating
Photoresist, spin on dielectric, and dopants
Platform: P8000 | P9000
Photoresist Developer
Aqueous, Solvent, and Aspirated solvent developers
Platform: P8000 | P9000
Wafer on Tape Frame
Protect coat & clean for saw/dicing
Platform: P9000
Wafer Scrubber / Cleaner
High pressure and mechanical cleaning
Platform: P8000 | P9000
Metal Lift-Off
Heated solvent with metal recover
Platform: P8000 | P9000
Wafer Alloy - Anneal
Economical Rapid Single wafer alloy
Platform: P7000
Optical Edge Bead Exposure
Programmable, multiple wave length capable
Platform: P9000
Closed Lid Co-Rotation Coater
Planarization of Thick Resist and Spin-On Dielectric
Platform: P9000
Spray Coating
Ultrasonic technology
Platform:P9000
Platform:P9000
Wafer Sorter
Traditional sorting with OCR
Platform: S5000
Wafer Inspection
Bright Light Macro Inspection
Platform: V2000 | V3000
Microscope Loader
Universal loader for most microscopes
Platform: V1020
Platform: V1020
Photoresist Coating
Minimize ESD during processing
Platform: 9000