SynchroSpin­® Planarized Coating System

SynchroSpin­® Planarized Coating System

Closed Lid Co-Rotation Coater - Greater Planarization with Reduced Waste

Description

C&D is proud to introduce the SynchroSpin­® Coating System as one of the customizable modules for our P9000 family of products.

The coat bowl, spin chuck, and the coat bowl lid all spin in synchronization.  This closed lid co-rotation coater results in near zero air turbulence inside the coat bowl which improves  coating planarization and greatly reduces chemical consumption.

The SynchroSpin­® Coating System is C&D’s state-of-the-art coating system variant that features the simultaneous rotation of both top and bottom of the closed coat bowl for a more controlled environment in which the photoresist is spread across the substrate during the spin coating processes.

The specially designed coater insert is also equipped with an integrated backside automatic wash function.

Used as a standalone coater, or together with other standard coater modules, your next P9000 tool will keep up with exacting requirements in today’s semiconductor industry.