Frame Processing Systems
P9000 Automatic/Manual Frame Coater & Processing System
The P9000 Frame Coater System is a software-controlled, pre-saw wafer coating and post-saw wafer cleaning system. The system features a high-performance spindle motor and high-precision stepper motor and can be operated in either auto or manual mode for thin wafers of different frame sizes.
C&D has developed specialized modules for handling wafers on both tape frame and expansion hoop rings, for processing substrates pre and post dice processing. C&D has developed special wafer handling solutions to transfer and spin wafers on tape frame and hoop rings simultaneously in the same tool. Specialized Wafer Clean & Coat Modules are designed as dual purpose, and can serve as a tape frame coater and a hoop ring cleaner, and can be outfitted with several kinds of chemical-mechanical agitation for wafer cleaning, including nitrogen aspirated spray.
Frame Processing Options:
- Nitrogen blow off
- Porous chuck
- Frame edge clean
- Custom cassettes
- Hot plate ovens
- Heated DI water
- Chemical mixing systems
- Aspirated heated DI water for cleaning
- DI water doping for ESD control
- Fire suppression
- Diverting valve (solvent and water separation)