Wafer Inspection Systems

V2000 Bright Light Inspection System

The V2000 Bright Light is a powerful, easy-to-use, dual-cassette, wafer-inspection system that can effectively discover all types of defects on wafers. The system can be operated in either auto or manual mode: the former automates wafer inspection through the use of recipes while the latter allows the operator the maximum operation flexibility. All operations, whether auto or manual, are carried out through the system’s intuitive graphical user interface. Its 34” x 45” footprint ensures that the system can be conveniently installed on a table top.

V3000 Macro-Scope Defect Review System

The V3000 Macro-Scope Defect Review System is a powerful, easy-to-use, dual-cassette, all-in-one wafer inspection system that is able to handle both macro- and micro-inspection of wafers. The system can be operated in either automatic or manual mode, making it possible to perform automated and manual inspections both on one system. It comes with a simple, intuitive, easy-to-use graphical user interface that allows the operator to carry out all inspection operations with ease. The system enable the operator to easily spot defects during macro inspection and then, with a few simple key strokes, clicks of the buttons, or touches on the screen, seamlessly move the substrate to the microscope for detailed inspections.

Wafer Inspection System V2000 and V3000 option:

  • OCR (top and bottom)

  • Digital image capture

  • Notch/flat find

  • Multiple lights (Spot, dark field, multiple spectrum neon, monochromatic green, other custom lights)





  • Backside inspection

  • SECS/GEM

  • Multiple wafer sizes without hardware change