Wafer Sorter

S5000-10 Floor-standing Sorter (up to 200 mm)

The S5010 is a recipe-driven, high-throughput wafer sorting system with an efficient radial footprint. The system can process wafers between 100mm and 200mm, at the speed of >350 wafers per hour (WPH) when reading laser marks and 750 WPH when transferring between cassettes. It boasts an impressive 10,000 hours Meantime Between Failures and 10,000 cycles Mean Wafers Between Assists.

S5000-30 Floor-standing Sorter (up to 300 mm)

The S5030 Sorter is a recipe-driven wafer sorting system which is capable of sorting wafers up to 300mm. The system features an optional  fixed thickness gauge as well as state-of-the-art Optical Character Recognition (OCR) enabling it to sort wafers either based on thickness or OCR. Its optional Uninterrupted Power Supply (UPS) ensures safe wafer transfer and data backup in the event of a power failure. The system can also process wafers based on process data generated by third-party machines.

For other 300mm Processing Tools, check out our P9000 Cluster System.

Wafer Sorter Options:

  • OCR (top and bottom)
  • Multiple wafer sizes without hardware change
  • Macro inspection light
  • Light curtain
  • Multiple cassettes
  • Optical centering
  • Ionizer
  • Uninterruptible Power Supply (UPS)s
  • Barcode reader